Piezoelectric Multilayer Beam Bending Actuators

Autoreninformationen

Rüdiger G. Ballas was born in 1971 in Blieskastel, Germany. After finishing education as an assistant in physics at the Technical School for Natural Sciences Ludwigshafen, Germany, he received the diploma in microsystemtechnology in 1999 from the University of Applied Sciences Kaiserslautern, Germany. From 1999 until 2001 he worked with Tele Quarz in Neckarbischofsheim, Germany, where he was head of the group concerning microstructuring of AT-quartz crystals and development of high-frequency inverted MESA-quartzes. From 2001 until 2006 he worked as a Ph.D. student at Darmstadt University of Technology in the field of piezoelectric bending multilayer actuators with integrated sensors for tip deflection measurements. He received the Ph.D. degree in electrical engineering in 2006 from Darmstadt University of Technology. His actual research fields are theoretical mechanics, electromechanical system theory and modeling of the nonlinear behavior of piezoelectric actuators.

Inhaltsverzeichnis

Introduction.- Piezoelectric materials.- Linear theory of piezoelectric materials.- Theory of piezoelectric beam bending actuators - static behaviour.- Piezoelectric beam benders and Hamilton's principle.- Dynamic behaviour of piezoelectric beam benders.- Electromechanical circuit representation of piezoelectric multilayer beam bending actuators.- Measurement setup.- Measurements and analytical calculations.- Piezoelectric beam bending actuator with integrated sensor.- Capacitive sensor for tip deflection measurement.- Inductive sensor for tip deflection measurement.- Conclusion and Outlook.- Appendix: List of figures.- List of tables.- Bibliography.- Author's publications

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